Providing Technological Solutions
for Semiconductor Wafer Transfer
About Hirokawa
Leveraging Internationally Leading Semiconductor Wafer Transfer Technology, Empowering the Advancement of China’s Semiconductor Industry
Hirokawa is committed to overcoming technical barriers to achieve autonomous and fully controllable semiconductor wafer transfer equipment development, Striving to provide comprehensive, full-stack semiconductor wafer transfer technology solutions within China.
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Complete Product Portfolio

Atmospheric Robot

Featuring advanced multi-joint robotic arm designs with rapid integration capabilities,
utilizing traveling axes, compatible with single-row Loadports.

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Vacuum Robot

Equipped with direct drive (DD motors) for highly stable wafer transfer, offering exceptional reliability with MCBF >12M,
corrosion resistance, and automatic offset correction.

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EFEM

Ultra-high cleanliness, high throughput, exceptional reliability, and customization.

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Sorter

Versatile functions with user-friendly operation, efficient visualization, and WPH≥250 (equipped with OCR).

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Platform

Ultra-high cleanliness, high vacuum, multiple docking configurations for process equipment,
high capacity, and high throughput.

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Complete solutions

Ultra-high cleanliness, high vacuum, high Throughput, with multiple docking configurations for process equipment.

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We welcome you to join us

We offer all employees equal development opportunities, fair advancement planning, and sustainable growth. Join us with confidence as we together advance into an unbounded future through continuously expanding innovative business scenario.

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