Atmospheric Robot
Featuring advanced multi-joint robotic arm designs with rapid integration capabilities,
utilizing traveling axes, compatible with single-row Loadports.
Vacuum Robot
Equipped with direct drive (DD motors) for highly stable wafer transfer, offering exceptional reliability with MCBF >12M,
corrosion resistance, and automatic offset correction.
EFEM
Ultra-high cleanliness, high throughput, exceptional reliability, and customization.
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Sorter
Versatile functions with user-friendly operation, efficient visualization, and WPH≥250 (equipped with OCR).
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Platform
Ultra-high cleanliness, high vacuum, multiple docking configurations for process equipment,
high capacity, and high throughput.
Complete solutions
Ultra-high cleanliness, high vacuum, high Throughput, with multiple docking configurations for process equipment.
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