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About Hirokawa

Hirokawa Technology was founded in April 2019 in Shanghai. The company primarily builds upon advanced overseas robotics control technologies and is supported by a team of experts and seasoned engineers from China’s semiconductor sector. Research and development are conducted in Shanghai with a strong focus on product localization. Hirokawa’s core business encompasses atmospheric robot,vacuum robot, semiconductor front-end automation equipment including EFEM, sorters, vacuum platforms, motion control systems, and a comprehensive suite of semiconductor wafer transfer solutions.

Hirokawa is dedicated to overcoming technological barriers to achieve autonomous and controllable development of semiconductor wafer transfer equipment, striving to become a domestic leader in delivering end-to-end semiconductor transfer technology solutions.

Hirokawa Technology was founded in April 2019 in Shanghai. The company primarily builds upon advanced overseas robotics control technologies and is supported by a team of experts and seasoned engineers from China’s semiconductor sector. Research and development are conducted in Shanghai with a strong focus on product localization. Hirokawa’s core business encompasses atmospheric robot,vacuum robot, semiconductor front-end automation equipment including EFEM, sorters, vacuum platforms, motion control systems, and a comprehensive suite of semiconductor wafer transfer solutions.

Hirokawa is dedicated to overcoming technological barriers to achieve autonomous and controllable development of semiconductor wafer transfer equipment, striving to become a domestic leader in delivering end-to-end semiconductor transfer technology solutions.

Mission and Core Values

Our Mission

To empower the advancement of China’s semiconductor industry through internationally leading semiconductor wafer transfer technology.

Our Core Values

  • Continuous Innovation
    Advanced Technology Driving Market Leadership

  • Quality Excellence
    Superior Products Serving Customers

  • Shared Value Creation
    Collaborative Win-Win Partnerships

Hirokawa’s Competitive Advantages

01

Robust Technical Team

We possess a highly professional and technically proficient R&D team, structured on a model that combines domestic and international experts with seasoned professionals from the industry. Our R&D personnel account for 30% of the total workforce. We are committed to continuous technological innovation and product development in the field of semiconductor wafer transfer. Currently, our product portfolio has achieved comprehensive coverage of front-end semiconductor process equipment.

02

Extensive Product Portfolio

The company’s product portfolio encompass universal equipment for semiconductor wafer transmission, ranging from standalone units to fully integrated systems, suitable for both atmospheric and vacuum environments. We provide a diverse array of solutions tailored to customer requirements, empowering clients to concentrate on process innovation.

03

Localized Service Support

Strategically established after-sales service centers in key semiconductor industry hubs nationwide facilitate rapid customer response and effective issue resolution, delivering secure and reliable support.

Development Milestones

2019
Company foundation and establishment of R&D and manufacturing teams
2020
Commencement of official production → Shipment of the first vacuum robot,
First EFEM shipment and first shipment of independently developed robots
2021
Market validation successfully completed, progressing to mass production → introduction of the first sorter machine
Renowned domestic FAB facility with over one hundred units shipped in the EFEM category,
Platform product shipments
2022
Mass production phase, robots included,
Several hundred EFEM units shipped to date
2019202020212022

Corporate Honors

  • Corporate Honors
  • Corporate Certifications
2024
Enterprise Honors
2024 Shanghai SMEs Most Prominent Growth Brand List – Top 100 Enterprises

Organizing Committee of China Brand Economy (Shanghai) Forum and Shanghai Enterprise Culture and Brand Research Institute

2024
Enterprise Honors
2023 Baoshan District 'Safe Unit' Award

Baoshan Safe Construction Coordination Committee

2024
Enterprise Honors
Council Member of the Shanghai Informatization Council

Shanghai Economic and Information Development Research Center, 'Shanghai Informatization' Council

2023
Enterprise Honors
2023 Benchmark Enterprise for Intelligent Robotics

Shanghai Municipal Commission of Economy and Informatization

2023
Enterprise Honors
Baoshan District Harmonious Labor Relations Standard Enterprise

Shanghai Baoshan District Human Resources and Social Security Bureau, Shanghai Baoshan District Federation of Trade Unions, Shanghai Baoshan District Federation of Industry and Commerce, Shanghai Baoshan District Enterprises Association

2023
Enterprise Honors
Baoshan District Enterprise Technology Center

Shanghai Baoshan District Economic Committee

2023
Charitable Donation
Certificate of Donation to Charitable Foundation

Shanghai Charity Foundation

2023
Enterprise Honors
Specialized and New SME (Small and Medium-sized Enterprises)

Shanghai Municipal Commission of Economy and Informatization

2023
Enterprise Honors
Baoshan District Harmonious Labor Relations Standard Enterprise

Shanghai Baoshan District Human Resources and Social Security Bureau, Shanghai Baoshan District Federation of Trade Unions, Shanghai Baoshan District Federation of Industry and Commerce, Shanghai Baoshan District Enterprises Association

2024
Patent Certificate
Invention Patent for an Anti-Slip Device and Mechanical Finger for Wafer Transfer

National Intellectual Property Administration

2024
Patent Certificate
Invention Patent for a Variable-Track Telescopic Mechanical Arm Assembly and Semiconductor Wafer Dual-Arm Handling Robot

National Intellectual Property Administration

2024
Patent Certificate
Invention Patent for a Self-Adjusting Positioning Pin and End Effector of FOUP Handling Robot

National Intellectual Property Administration

2024
Certificate of Certification
Quality Management System Certification Certificate

China Quality Certification Center

2023
Patent Certificate
Invention Patent for an Equipment Positioning Device and Positioning Method

National Intellectual Property Administration

2023
Patent Certificate
Invention Patent for a Wafer Transfer System

National Intellectual Property Administration

2023
Patent Certificate
Invention Patent for a Method to Acquire Wafer Status on the Vacuum Side of Semiconductor Transfer Systems

National Intellectual Property Administration

2023
Patent Certificate
Invention Patent for an Interface Testing Device and Method

National Intellectual Property Administration

2023
Patent Certificate
Invention Patent for an Interface Testing Device and Method

National Intellectual Property Administration

2022
Patent Certificate
Invention Patent for a Semiconductor Device

National Intellectual Property Administration

2022
Patent Certificate
Invention Patent for a Wafer Transfer Device and Transfer Method

National Intellectual Property Administration

2021
Invention Patent Certificate
Patent Certificate for Load Locking Device and Substrate Transfer Method

National Intellectual Property Administration

2021
Software Copyright
Computer Software Copyright Registration Certificate

National Copyright Administration of the People’s Republic of China

2021
ISO Certificate
ISO Certificate

China Quality Certification Center