Hirokawa delivers transmission solutions for a wide range of semiconductor process equipment
The Sorter is a key sorting device in semiconductor wafer FABs. Hirokawa's Sorter, paired with self-developed robots, features high stability and high efficiency, and has been mass-produced in leading semiconductor FAB plants.
| Item | Specification |
|---|---|
| Product | 8Port Sorter |
| Model | GS08 |
| Dimensions (mm) | W2600 D1271 H2200 |
| Number of Ports | 8 |
| Handling Object Wafer | 300 mm silicon wafer (Diameter: 300mm ±0.2mm Thickness 775μm) |
| Corresponding Carrier | 300mm FOUP, 300mm Auto FOSB |
| Cleanliness | ISO Class1 |
| Robot | GM124ANE/GM124ANV |
| Pre Laligner | PER1130/PVR1130 |
| Robot Controller | SR100 |
| Loadport | Chinese-made or Japanese-made |
| FFU | ULPA 99.99995% at 0.1μm |
| Carrier ID | RFID or barcode optional |
| Wafer ID Code | SEMI-T7, M12, M13, M1.15 |
| Power supply voltage | Single-phase 220V, 50Hz, 3kVA |
| CDA | 0.4~0.6MPa, 140L/min |
| Vacuum | -80~-70kPa, 45L/min |
